規格:

HGPC100

• 可在線測量半導體特殊材料氣體

Enables inline measurement of semiconductor special material gases

• 5通道的微粒子量測:Simultaneous 5-channels particle measurement 0.1 μm and above, 0.15 μm and above, 0.2 μm and above, 0.3 μm and above, 0.5 μm and above .

• 流量:額定流量Rated flow rate: 100 mL/min, 最大流量max. 300 mL/min.

• 可直接量測惰性氣體/腐蝕性等氣體:Direct measurement of inert gas as well as corrosive, reactive and other gases.

• 無洩漏氣體:Realizes leak-tight, outgas-free conditions without dead space.

• 支援各類氣體:Supports to N2 , CO2 , Ar , He , CDA , etc.

• 防爆處理:針對特殊氣體,如氫氣:Explosion-proof design for H2, O2,etc.