Gas Particle counter
Gas Particle counter
特殊氣體與高壓氣體微粒子計數器 | 半導體製藥供氣系統專用
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特殊氣體雷射微塵粒子計數器Gas counter
支援高壓環境採樣、耐腐蝕設計、適用於 CDA、N2、Ar 等多種氣體檢測
規格:
HGPC100
可在線測量半導體特殊材料氣體
Enables inline measurement of semiconductor special material gases
5通道的微粒子量測:Simultaneous 5-channels particle measurement 0.1 μm and above, 0.15 μm and above, 0.2 μm and above, 0.3 μm and above, 0.5 μm and above .
流量:額定流量Rated flow rate: 100 mL/min, 最大流量max. 300 mL/min.
可直接量測惰性氣體/腐蝕性等氣體:Direct measurement of inert gas as well as corrosive, reactive and other gases.
無洩漏氣體:Realizes leak-tight, outgas-free conditions without dead space.
支援各類氣體:Supports to N2 , CO2 , Ar , He , CDA , etc.
防爆處理:針對特殊氣體,如氫氣:Explosion-proof design for H2, O2,etc.
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